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ASML- SCARADOUBLE FOLD ARM

2016 ASML Double Fold Arm / SCARA

  • Repair Tech : Build up testing Platform that is the same with ASML  driver and controller.
  • Repair Kit : Get  New Key Parts (New harmonic drive motor and encoder ) + Mechanism
  • Testing Platform : Analysis Failure Mode, Cycle Test (more than 1000 times) and Accuracy Test
  • Exchange or Overhaul (Delivery : 3-8 Weeks)
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scara robot

393854

double fold arm robot

ETCH

KAWASAKISHINKONABTESCOYASKAWA SEMITOOL

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CVD

KAWASAKIYASKAWA

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DIFF

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CMP

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PVD

KAWASAKIYASKAWARORZE

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Other

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Overhaul Service

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