ASML- SCARA、DOUBLE FOLD ARM
2016 ASML Double Fold Arm / SCARA
- Repair Tech : Build up testing Platform that is the same with ASML driver and controller.
- Repair Kit : Get New Key Parts (New harmonic drive motor and encoder ) + Mechanism
- Testing Platform : Analysis Failure Mode, Cycle Test (more than 1000 times) and Accuracy Test
- Exchange or Overhaul (Delivery : 3-8 Weeks)

scara robot

double fold arm robot
ETCH
KAWASAKI、SHINKO、NABTESCO、YASKAWA、 SEMITOOL

CVD
KAWASAKI、YASKAWA

DIFF
KAWASAKI、YASKAWA、AITEC、HIRATA、RORZE

CMP
KAWASAKI、YASKAWA、HIRATA

PVD
KAWASAKI、YASKAWA、RORZE

Overhaul Service
