ROBOT Repair & Overhaul Service

PHOTO

ASML- SCARA、DOUBLE FOLD ARM

2016 ASML Double Fold Arm / SCARA

• Repair Tech : Build up testing Platform that is the same with ASML  driver and controller.
• Repair Kit : Get  New Key Parts (New harmonic drive motor and encoder ) + Mechanism
• Testing Platform : Analysis Failure Mode, Cycle Test (more than 1000 times) and Accuracy Test
• Exchange or Overhaul (Delivery : 3-8 Weeks)

CVD

KAWASAKI、YASKAWA

DIFF

KAWASAKI、YASKAWA、AITEC、HIRATA、RORZE

CMP

KAWASAKI、YASKAWA、HIRATA

PVD

KAWASAKI、YASKAWA、RORZE

Other

RORZE、TAZMO、IDE、DAIHEN、SANKYO、ASYST、 IAI、HITACHI…

Overhaul Service